| Code: | F K06 |
| Department: | Department of Experimental Physics |
| Course director: | Miklós Török |
| Credits: | 2 |
| Semester: | not fixed |
| Hours/week: | 2+0 |
| Prerequisities: | Solid State Physics |
| Type of assessment: | K or B |
Course description:
Crystal growth and slicing of the
monocrystals. Methods of layer growing: evaporation in vacuum, chemical
vapour phase deposition, vapour and liquid phase epitaxy, molecular beam
epitaxy. Methods of layer removal: chemical etching (in gas and liquid
phase), plasma ion and beam etching, reactive sputtering. Chemical modification
of layers (oxidation, nitridisation). Alloying: diffusion, ion implantation.
Determination of properties of thin layers: ellipsometry (thickness determination),
X-ray and electron diffraction, electron- and mass spectroscopic methods,
optical and infrared spectroscopy, scanning electron-, tunnelling-, and
atomic force microscopy. Structure and production of monolithic integrated
circuits: production of photomask, photo-,electron- and X-ray lithography.
Isolating the components of the integrated circuits. Building and removal
of masking, insulating and contact layers. Contacting and encapsulation.
Recommended Texts:
| To first page | Departments of Physics | University, Szeged |